Generating multi-component multi-layer coatings type mecraly using multi-cathode magnetron sputtering systems
نویسندگان
چکیده
منابع مشابه
Microstructure of MmM(5)/Mg multi-layer hydrogen storage films prepared by magnetron sputtering.
Multi-layer hydrogen storage thin films with Mg and MmNi3.5(CoAlMn)1.5 (here Mm denotes La-rich mischmetal) as alternative layers were prepared by direct current magnetron sputtering. Transmission electron microscopy investigation shows that the microstructure of the MmNi3.5(CoAlMn)1.5 and Mg layers are significantly different although their deposition conditions are the same. The MmNi3.5(CoAlM...
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ژورنال
عنوان ژورنال: MATEC Web of Conferences
سال: 2017
ISSN: 2261-236X
DOI: 10.1051/matecconf/201712902007